The RGA Residual Gas Analyzer series utilizes 100, 200 and 300 amu resolution systems, and are capable of achieving six orders of magnitude in one scan. The unit has a detection limit of 5 x 10-14 Torr..RGA残余气体分析仪系列用100200和300 amu分率的系统并够在一个扫描到六个数级。单位有一个5×10-14乇..检测RGA models are comprised of an electronics control unit (ECU), a quadrupole probe, and a Windows software for data analysis.RGA的模型是由一个电子控制单元ECU四极探头和数据分析件。