The UGAPM Series Process Monitoring Systems are created for analyzing gas processes. The UGAPM system uses a single stage capillary pressure reducing inlet to sample gases from 1 mTorr to 20 Torr. This instrument is suitable for on-line analysis since its inlet consistently samples gases at low flow rate, at approximately 5×10-5 mbar L/sec.ugapm系列的程监测系统是用于分析气体的产生程。系统用单级ugapm毛细管压力低口样品从1毫乇20乇的气体。仪器用于在线分析从入口一直在低流气体样品在约5×10 -5毫巴升/秒。