The PPR Process Monitoring System is best used for inline process monitoring as well as diagnostics. This unit is capable of providing two separate paths that lead to the residual gas analyzer (RGA), a high conductivity path and pressure reduction path. The first one serves to monitor the base vacuum, while the second one contains a micro-hole opening that works at pressures of 0.01, 0.1, 1 or 10 Torr, and is used for the observation of process at operating pressure. It is capable of reducing the sample pressure to the value that the RGA can handle, normally between 10 to 6 Torr. In order to accomplish this, two pumps are used the hybrid turbomolecular and a diaphragm pump.PPR程监控系统是最好的用于在线程监测和断。本单位可提供两种不同的径导残余气体分析仪RGA导电性的径和压。第一个用于监测本底真空第二个含有微孔工作在0.010.1压力1或10乇并在操作压力为程的测。它可减少样品的压力RGA可以处理的值常在106乇。为了做到一点两泵均用混合涡分子泵和泵。